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Research literature / Conference paper

Posters: Edge AI-Based Integrated Model Architecture for Optimization of Semiconductor ALD Processes

Hyungkoo Kim; ChulSeoung Chae; ByeolHee Sim; DongSik Yoon; JeongHoon Kang

Published
Publisher
ACM
Journal / collection
Proceedings of the 23rd Annual International Conference on Mobile Systems, Applications and Services
Research area
Semiconductors
Source type
Conference paper
DOI
10.1145/3711875.3734557

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Hyungkoo Kim; ChulSeoung Chae; ByeolHee Sim; DongSik Yoon; JeongHoon Kang. Posters: Edge AI-Based Integrated Model Architecture for Optimization of Semiconductor ALD Processes. Proceedings of the 23rd Annual International Conference on Mobile Systems, Applications and Services. 2025-06-23. https://doi.org/10.1145/3711875.3734557

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