Four-bed vacuum pressure swing adsorption for xenon recycling from semiconductor waste gas
YeonJi Choi; Kyung Min Choi; Kyungtae Park
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Separation and Purification Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.seppur.2024.130477
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Cite this source
YeonJi Choi; Kyung Min Choi; Kyungtae Park. Four-bed vacuum pressure swing adsorption for xenon recycling from semiconductor waste gas. Separation and Purification Technology. 2025-06. https://doi.org/10.1016/j.seppur.2024.130477