Quantifying floor-borne vibration sensitivity in semiconductor test equipment using controlled excitation
Giovanni Rinaldi; Edem Kokou; Chris Moeller
- Published
- Publisher
- Institute of Noise Control Engineering (INCE)
- Journal / collection
- INTER-NOISE and NOISE-CON Congress and Conference Proceedings
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3397/nc_2026_0087
The original publisher provides the full text and its access options.
Cite this source
Giovanni Rinaldi; Edem Kokou; Chris Moeller. Quantifying floor-borne vibration sensitivity in semiconductor test equipment using controlled excitation. INTER-NOISE and NOISE-CON Congress and Conference Proceedings. 2026-07-20. https://doi.org/10.3397/nc_2026_0087