Intelligent Assistants for the Semiconductor Failure Analysis with LLM-Based Planning Agents
Aline Dobrovsky; Konstantin Schekotihin; Christian Burmer
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2025p0041
The original publisher provides the full text and its access options.
Cite this source
Aline Dobrovsky; Konstantin Schekotihin; Christian Burmer. Intelligent Assistants for the Semiconductor Failure Analysis with LLM-Based Planning Agents. International Symposium for Testing and Failure Analysis. 2025-11-16. https://doi.org/10.31399/asm.cp.istfa2025p0041