Advanced Group-IV Epitaxy and Integration Strategies for GAA Nanosheet Transistor Performance Enhancement
Shogo Mochizuki; Curtis Durfee; Nicolas Loubet
- Published
- Publisher
- The Japan Society of Applied Physics
- Journal / collection
- Extended Abstracts of the 2025 International Conference on Solid State Devices and Materials
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.7567/ssdm.2025.h-1-01
The original publisher provides the full text and its access options.
Cite this source
Shogo Mochizuki; Curtis Durfee; Nicolas Loubet. Advanced Group-IV Epitaxy and Integration Strategies for GAA Nanosheet Transistor Performance Enhancement. Extended Abstracts of the 2025 International Conference on Solid State Devices and Materials. 2025-09-16. https://doi.org/10.7567/ssdm.2025.h-1-01