Perspectives and Limitations of STEM EBIC Measurements for the Characterization of Semiconductor Devices
Sebastian Schneider; Darius Pohl; Bernd Rellinghaus
- Published
- Publisher
- Oxford University Press (OUP)
- Journal / collection
- Microscopy and Microanalysis
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1093/mam/ozaf048.888
The original publisher provides the full text and its access options.
Cite this source
Sebastian Schneider; Darius Pohl; Bernd Rellinghaus. Perspectives and Limitations of STEM EBIC Measurements for the Characterization of Semiconductor Devices. Microscopy and Microanalysis. 2025-07. https://doi.org/10.1093/mam/ozaf048.888