Design and Fabrication of a High-Temperature Stable, Low-Power Microheater for Semiconductor Gas Sensors
Jun Hyeok Lee; Tae Won Ha; Chil-Hyoung Lee; Dong-Weon Lee
- Published
- Publisher
- The Korean Sensors Society
- Journal / collection
- JOURNAL OF SENSOR SCIENCE AND TECHNOLOGY
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.46670/jsst.2026.35.1.22
The original publisher provides the full text and its access options.
Cite this source
Jun Hyeok Lee; Tae Won Ha; Chil-Hyoung Lee; Dong-Weon Lee. Design and Fabrication of a High-Temperature Stable, Low-Power Microheater for Semiconductor Gas Sensors. JOURNAL OF SENSOR SCIENCE AND TECHNOLOGY. 2026-01-31. https://doi.org/10.46670/jsst.2026.35.1.22