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A Data-Driven Approach to Predict OHT Travel Time in Semiconductor FABs

Seongho Cho; Jeetae Seo; Sangchul Park

Published
Publisher
IEEE
Journal / collection
2025 8th International Conference on Robotics, Control and Automation Engineering (RCAE)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/rcae66389.2025.11355257

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Seongho Cho; Jeetae Seo; Sangchul Park. A Data-Driven Approach to Predict OHT Travel Time in Semiconductor FABs. 2025 8th International Conference on Robotics, Control and Automation Engineering (RCAE). 2025-10-24. https://doi.org/10.1109/rcae66389.2025.11355257

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