A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling
Xu Han; Marcella Miller; James Moyne; Gregory William Vogl; Anita Penkova; Xiaodong Jia
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2025.3531920
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Cite this source
Xu Han; Marcella Miller; James Moyne; Gregory William Vogl; Anita Penkova; Xiaodong Jia. A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling. IEEE Transactions on Semiconductor Manufacturing. 2025-05. https://doi.org/10.1109/tsm.2025.3531920