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Research literature / Conference paper

Generative AI-Powered Document Analysis with Large Language Models in the Semiconductor Sector

Susan Sun; Melissa Gledhill; Ikhlas Manzur; Lional Ananda Wijethilaka; Siddharth Ajit; Abe Hsu; Jeff Shelman; Justin Chown

Published
Publisher
IEEE
Journal / collection
2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Research area
AI & compute
Source type
Conference paper
DOI
10.1109/asmc69324.2026.11551190

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Susan Sun; Melissa Gledhill; Ikhlas Manzur; Lional Ananda Wijethilaka; Siddharth Ajit; Abe Hsu; Jeff Shelman; Justin Chown. Generative AI-Powered Document Analysis with Large Language Models in the Semiconductor Sector. 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2026-05-11. https://doi.org/10.1109/asmc69324.2026.11551190

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