Enhancing Semiconductor Wafer Defect Detection using Hybrid CNN-ViT with Denoising Autoencoders
Abhishek. S. B; Sukhesh Kanna; Benedict Johnson; Suganeshwari G
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 IEEE 9th International Conference on Information and Communication Technology (CICT)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/cict67193.2025.11398920
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Cite this source
Abhishek. S. B; Sukhesh Kanna; Benedict Johnson; Suganeshwari G. Enhancing Semiconductor Wafer Defect Detection using Hybrid CNN-ViT with Denoising Autoencoders. 2025 IEEE 9th International Conference on Information and Communication Technology (CICT). 2025-12-19. https://doi.org/10.1109/cict67193.2025.11398920