Process-aware graph-temporal framework for equipment prognostics with multimodal data at semiconductor final test
Lerroy Ashwin Amal Roy; James Sze Boon Beh; Chai Kiat Yeo; Shyamsunder Regunathan
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Computers & Industrial Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.cie.2026.111872
The original publisher provides the full text and its access options.
Cite this source
Lerroy Ashwin Amal Roy; James Sze Boon Beh; Chai Kiat Yeo; Shyamsunder Regunathan. Process-aware graph-temporal framework for equipment prognostics with multimodal data at semiconductor final test. Computers & Industrial Engineering. 2026-04. https://doi.org/10.1016/j.cie.2026.111872