Cross Domain Anomaly Detection in Semiconductor Manufacturing via Projection Comparison and Reconstruction in Latent Space
Xinwei Lv; Haiyong Chen; Zhaoyang Wang
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3665531
The original publisher provides the full text and its access options.
Cite this source
Xinwei Lv; Haiyong Chen; Zhaoyang Wang. Cross Domain Anomaly Detection in Semiconductor Manufacturing via Projection Comparison and Reconstruction in Latent Space. IEEE Transactions on Semiconductor Manufacturing. 2026-05. https://doi.org/10.1109/tsm.2026.3665531