Development of a Gigahertz-Range Microstrip Sensor for Monitoring the Doping of Semiconductor Structures
R. S. Chykun; I. M. Bondarenko; O. V. Hlukhov; V. A. Chekubasheva
- Published
- Publisher
- Sumy State University
- Journal / collection
- Journal of Nano- and Electronic Physics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.21272/jnep.18(3).03013
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Cite this source
R. S. Chykun; I. M. Bondarenko; O. V. Hlukhov; V. A. Chekubasheva. Development of a Gigahertz-Range Microstrip Sensor for Monitoring the Doping of Semiconductor Structures. Journal of Nano- and Electronic Physics. 2026. https://doi.org/10.21272/jnep.18(3).03013