(Invited) Material and Process Co-Optimization for Semiconductor Device Manufacturing
Bhushan Zope; Randall Higuchi; Martin McBriarty; Charlene Chen; Lanxia Cheng; Daniel Lee
- Published
- Publisher
- The Electrochemical Society
- Journal / collection
- ECS Meeting Abstracts
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1149/ma2025-02311609mtgabs
The original publisher provides the full text and its access options.
Cite this source
Bhushan Zope; Randall Higuchi; Martin McBriarty; Charlene Chen; Lanxia Cheng; Daniel Lee. (Invited) Material and Process Co-Optimization for Semiconductor Device Manufacturing. ECS Meeting Abstracts. 2025-11-24. https://doi.org/10.1149/ma2025-02311609mtgabs