Online Temperature Monitoring System for Semiconductor Automated Test Equipment Using Local Gaussian Process
Jongwon Kim; Seung Min Baik; Dahm Yu; Jaehyun Kim; Young Myoung Ko
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3665465
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Cite this source
Jongwon Kim; Seung Min Baik; Dahm Yu; Jaehyun Kim; Young Myoung Ko. Online Temperature Monitoring System for Semiconductor Automated Test Equipment Using Local Gaussian Process. IEEE Transactions on Semiconductor Manufacturing. 2026-05. https://doi.org/10.1109/tsm.2026.3665465