Deterministic EtherCAT-Based Control Architectures for High-Precision Semiconductor Manufacturing Systems
Utkarshkumar Shah
- Published
- Publisher
- Universitas Malikussaleh
- Journal / collection
- International Journal of Engineering, Science and Information Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.52088/ijesty.v6i2.1821
The original publisher provides the full text and its access options.
Cite this source
Utkarshkumar Shah. Deterministic EtherCAT-Based Control Architectures for High-Precision Semiconductor Manufacturing Systems. International Journal of Engineering, Science and Information Technology. 2026-04-22. https://doi.org/10.52088/ijesty.v6i2.1821