Proposed Automated Sample Preparation and SEM Imaging Workflow for Semiconductor Wafers
Nitin Varshney; Shajib Ghosh; Patrick Craig; Antika Roy; Navid Asadizanjani
- Published
- Publisher
- Oxford University Press (OUP)
- Journal / collection
- Microscopy and Microanalysis
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1093/mam/ozaf048.250
The original publisher provides the full text and its access options.
Cite this source
Nitin Varshney; Shajib Ghosh; Patrick Craig; Antika Roy; Navid Asadizanjani. Proposed Automated Sample Preparation and SEM Imaging Workflow for Semiconductor Wafers. Microscopy and Microanalysis. 2025-07. https://doi.org/10.1093/mam/ozaf048.250