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Research literature / Conference paper

Integration of curvilinear design into semiconductor logic technology and its manufacturability

Ryoung-Han . Kim; Soobin Hwang; Hsinlan Chang; Kiho Yang; Yasser Sherazi; Halil Kuekner; Ru-Gun Liu; Youssef Drissi

Published
Publisher
SPIE
Journal / collection
DTCO and Computational Patterning IV
Research area
Semiconductors
Source type
Conference paper
DOI
10.1117/12.3051863

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Ryoung-Han . Kim; Soobin Hwang; Hsinlan Chang; Kiho Yang; Yasser Sherazi; Halil Kuekner; Ru-Gun Liu; Youssef Drissi. Integration of curvilinear design into semiconductor logic technology and its manufacturability. DTCO and Computational Patterning IV. 2025-04-23. https://doi.org/10.1117/12.3051863

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