Off-Axis Electron Holography of Point Defects in Semiconductor Devices
Keyan Ji; Michael Schnedler; Qianqian Lan; Rafal E Dunin-Borkowski; Philipp Ebert
- Published
- Publisher
- Oxford University Press (OUP)
- Journal / collection
- Microscopy and Microanalysis
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1093/mam/ozag053.597
The original publisher provides the full text and its access options.
Cite this source
Keyan Ji; Michael Schnedler; Qianqian Lan; Rafal E Dunin-Borkowski; Philipp Ebert. Off-Axis Electron Holography of Point Defects in Semiconductor Devices. Microscopy and Microanalysis. 2026-07. https://doi.org/10.1093/mam/ozag053.597