Simulation of a Semiconductor Manufacturing Research and Development Cleanroom
Baptiste Loriferne; Gaëlle Berthoux; Valeria Borodin; Vincent Fischer; Agnès Roussy
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 Winter Simulation Conference (WSC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/wsc68292.2025.11339098
The original publisher provides the full text and its access options.
Cite this source
Baptiste Loriferne; Gaëlle Berthoux; Valeria Borodin; Vincent Fischer; Agnès Roussy. Simulation of a Semiconductor Manufacturing Research and Development Cleanroom. 2025 Winter Simulation Conference (WSC). 2025-12-07. https://doi.org/10.1109/wsc68292.2025.11339098