A multimodal hierarchical learning approach for virtual metrology in semiconductor manufacturing
Qunlong Chen; Wei Qin; Hongwei Xu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmsy.2025.02.010
The original publisher provides the full text and its access options.
Cite this source
Qunlong Chen; Wei Qin; Hongwei Xu. A multimodal hierarchical learning approach for virtual metrology in semiconductor manufacturing. Journal of Manufacturing Systems. 2025-06. https://doi.org/10.1016/j.jmsy.2025.02.010