Data-Driven Quality Optimization for Wafer Manufacturing Process
Jiaqi Wang; Ying Zhang; Yu Yuan
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 IEEE 3rd International Conference on Big Data Science and Engineering (ICBDSE)
- Research area
- Industrial systems
- Source type
- Conference paper
- DOI
- 10.1109/icbdse70225.2026.11635203
The original publisher provides the full text and its access options.
Cite this source
Jiaqi Wang; Ying Zhang; Yu Yuan. Data-Driven Quality Optimization for Wafer Manufacturing Process. 2026 IEEE 3rd International Conference on Big Data Science and Engineering (ICBDSE). 2026-06. https://doi.org/10.1109/icbdse70225.2026.11635203