High spatial resolution ion beam machining: shaping the future of optics, photonics, and semiconductor manufacturing
C. Schindler; S. Gürtler; C. Kettmann; M. Hubeny
- Published
- Publisher
- SPIE
- Journal / collection
- Optifab 2025
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3071929
The original publisher provides the full text and its access options.
Cite this source
C. Schindler; S. Gürtler; C. Kettmann; M. Hubeny. High spatial resolution ion beam machining: shaping the future of optics, photonics, and semiconductor manufacturing. Optifab 2025. 2025-12-03. https://doi.org/10.1117/12.3071929