Ultracompact metalens-based interferometer for manufacturing metrology
Dawei Tang; James Williamson; Daniel Townend; Andrew Henning; Haydn Martin; Xiangqian Jiang
- Published
- Publisher
- SPIE
- Journal / collection
- Optics and Photonics for Advanced Dimensional Metrology IV
- Research area
- Industrial systems
- Source type
- Conference paper
- DOI
- 10.1117/12.3098896
The original publisher provides the full text and its access options.
Cite this source
Dawei Tang; James Williamson; Daniel Townend; Andrew Henning; Haydn Martin; Xiangqian Jiang. Ultracompact metalens-based interferometer for manufacturing metrology. Optics and Photonics for Advanced Dimensional Metrology IV. 2026-05-29. https://doi.org/10.1117/12.3098896