Reducing the Environmental Impact of Wet Chemical Processes for Advanced Semiconductor Manufacturing
Mateusz Gocyla; Lizzie Boakes; Herbert Struyf; Rachid Chokri; Tibo Vandevenne; Jo Van Caneghem; Cedric Rolin; Stefan De Gendt
- Published
- Publisher
- MDPI AG
- Journal / collection
- Sustainable Chemistry
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/suschem7010008
The original publisher provides the full text and its access options.
Cite this source
Mateusz Gocyla; Lizzie Boakes; Herbert Struyf; Rachid Chokri; Tibo Vandevenne; Jo Van Caneghem; Cedric Rolin; Stefan De Gendt. Reducing the Environmental Impact of Wet Chemical Processes for Advanced Semiconductor Manufacturing. Sustainable Chemistry. 2026-02-02. https://doi.org/10.3390/suschem7010008