Ensemble Virtual Metrology Models of Semiconductor Processes
Yawei Chen; Shaohua Chang; Eric Chien
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Sensors Journal
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/jsen.2026.3678302
The original publisher provides the full text and its access options.
Cite this source
Yawei Chen; Shaohua Chang; Eric Chien. Ensemble Virtual Metrology Models of Semiconductor Processes. IEEE Sensors Journal. 2026-05-01. https://doi.org/10.1109/jsen.2026.3678302