Adversarial VAE Sanitization for Privacy-Aware Data Sharing in Semiconductor Manufacturing
Luis F. Garcia; Stefano Rini; Shun C. Chang; Ying C. Hsu
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3707558
The original publisher provides the full text and its access options.
Cite this source
Luis F. Garcia; Stefano Rini; Shun C. Chang; Ying C. Hsu. Adversarial VAE Sanitization for Privacy-Aware Data Sharing in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing. 2026-08. https://doi.org/10.1109/tsm.2026.3707558