Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication
Beomseok Song; Seunghwan Song; Jun-Geol Baek
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2025.3532300
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Cite this source
Beomseok Song; Seunghwan Song; Jun-Geol Baek. Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication. IEEE Transactions on Semiconductor Manufacturing. 2025-05. https://doi.org/10.1109/tsm.2025.3532300