AI-Enabled Preventive Action for Semiconductor Lithography Using LSTM, Transformers, and SHAP
Youssef Alothman; Mohamed Bader-El-Den; Lalit Maurya
- Published
- Publisher
- MDPI AG
- Journal / collection
- Semiconductors and Heterogeneous Integration
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/shi1020007
The original publisher provides the full text and its access options.
Cite this source
Youssef Alothman; Mohamed Bader-El-Den; Lalit Maurya. AI-Enabled Preventive Action for Semiconductor Lithography Using LSTM, Transformers, and SHAP. Semiconductors and Heterogeneous Integration. 2026-07-31. https://doi.org/10.3390/shi1020007