MSAD: efficient multiscale attention decoder for semiconductor image segmentation
Abhishek Goyal; Girish Kumar Ajmera; Arvind Nayak
- Published
- Publisher
- SPIE
- Journal / collection
- Metrology, Inspection, and Process Control XL
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3089370
The original publisher provides the full text and its access options.
Cite this source
Abhishek Goyal; Girish Kumar Ajmera; Arvind Nayak. MSAD: efficient multiscale attention decoder for semiconductor image segmentation. Metrology, Inspection, and Process Control XL. 2026-04-08. https://doi.org/10.1117/12.3089370