Mobility and Threshold Voltage Co‐Optimization of IGZO Field‐Effect Transistor with Ideal Subthreshold Swing through Atomic Layer Growth Control
Xiangyu Hao; Haozhe Wang; Tiaoyang Li; Yanheng Liu; Min Zeng; Yanqing Wu
- Published
- Publisher
- Wiley
- Journal / collection
- Advanced Electronic Materials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/aelm.202500524
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Cite this source
Xiangyu Hao; Haozhe Wang; Tiaoyang Li; Yanheng Liu; Min Zeng; Yanqing Wu. Mobility and Threshold Voltage Co‐Optimization of IGZO Field‐Effect Transistor with Ideal Subthreshold Swing through Atomic Layer Growth Control. Advanced Electronic Materials. 2025-12. https://doi.org/10.1002/aelm.202500524