Domestic Fluoropolymer Products for Microelectronic Manufacturing: A Review
E. N. Bol’basov; V. M. Buznik; D. A. Varlamov; A. O. Vorob’ev; G. E. Dubinenko; A. I. Eremchuk; M. E. Trusova
- Published
- Publisher
- Pleiades Publishing Ltd
- Journal / collection
- Russian Microelectronics
- Research area
- Industrial systems
- Source type
- Journal article
- DOI
- 10.1134/s106373972560075x
The original publisher provides the full text and its access options.
Cite this source
E. N. Bol’basov; V. M. Buznik; D. A. Varlamov; A. O. Vorob’ev; G. E. Dubinenko; A. I. Eremchuk; M. E. Trusova. Domestic Fluoropolymer Products for Microelectronic Manufacturing: A Review. Russian Microelectronics. 2025-12. https://doi.org/10.1134/s106373972560075x