A novel double Q-learning with invalid action masking for semiconductor ion implantation scheduling problem
Hung-Kai Wang; Ting-Yun Yang; Yan-Cheng Lin
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Computers & Industrial Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.cie.2025.111620
The original publisher provides the full text and its access options.
Cite this source
Hung-Kai Wang; Ting-Yun Yang; Yan-Cheng Lin. A novel double Q-learning with invalid action masking for semiconductor ion implantation scheduling problem. Computers & Industrial Engineering. 2026-01. https://doi.org/10.1016/j.cie.2025.111620