Innovations in advanced processes and systems for semiconductor manufacturing
Albert J. Shih; Wei Gao; Gregory W. Vogl; Dragan Djurdjanovic; Takafumi Fukushima; Ajay Malshe
- Published
- Publisher
- Elsevier BV
- Journal / collection
- CIRP Annals
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.cirp.2026.04.115
The original publisher provides the full text and its access options.
Cite this source
Albert J. Shih; Wei Gao; Gregory W. Vogl; Dragan Djurdjanovic; Takafumi Fukushima; Ajay Malshe. Innovations in advanced processes and systems for semiconductor manufacturing. CIRP Annals. 2026. https://doi.org/10.1016/j.cirp.2026.04.115