Modeling resources in research and development semiconductor manufacturing shop floors
Baptiste Loriferne; Gaëlle Berthoux; Valeria Borodin; Vincent Fischer; Agnès Roussy
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/asmc64512.2025.11010494
The original publisher provides the full text and its access options.
Cite this source
Baptiste Loriferne; Gaëlle Berthoux; Valeria Borodin; Vincent Fischer; Agnès Roussy. Modeling resources in research and development semiconductor manufacturing shop floors. 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2025-05-05. https://doi.org/10.1109/asmc64512.2025.11010494