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Research literature / Conference paper

Impact of the Inter-Fin Space on Stress Modulation and FinFET Transistor Performance

Angelo Rossoni; Tomasz Brozek; Sharad Saxena; Rajesh Khamankar; Zsolt M. Kovacs-Vajna

Published
Publisher
IEEE
Journal / collection
2025 International Conference on IC Design and Technology (ICICDT)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/icicdt65192.2025.11078040

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Angelo Rossoni; Tomasz Brozek; Sharad Saxena; Rajesh Khamankar; Zsolt M. Kovacs-Vajna. Impact of the Inter-Fin Space on Stress Modulation and FinFET Transistor Performance. 2025 International Conference on IC Design and Technology (ICICDT). 2025-06-23. https://doi.org/10.1109/icicdt65192.2025.11078040

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