Multi-Task Learning for Anomaly Detection and Remaining Useful Life Prediction in Semiconductor Manufacturing Systems
Min Yin
- Published
- Publisher
- Southern United Academy of Sciences Limited
- Journal / collection
- Journal of Computer Technology and Applied Mathematics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.70393/6a6374616d.333536
The original publisher provides the full text and its access options.
Cite this source
Min Yin. Multi-Task Learning for Anomaly Detection and Remaining Useful Life Prediction in Semiconductor Manufacturing Systems. Journal of Computer Technology and Applied Mathematics. 2026-01-05. https://doi.org/10.70393/6a6374616d.333536