Random Forest-Based Identification of Defect-Causing Steps in Semiconductor WET Processes
Chung-Yuan Yu; Ming-Lang Kuo; Chin-Che Hsu
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/asmc69324.2026.11551237
The original publisher provides the full text and its access options.
Cite this source
Chung-Yuan Yu; Ming-Lang Kuo; Chin-Che Hsu. Random Forest-Based Identification of Defect-Causing Steps in Semiconductor WET Processes. 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2026-05-11. https://doi.org/10.1109/asmc69324.2026.11551237