Secondary ion mass spectrometry as a tool to analyze semiconductor opening switch diodes
Marie-Amandine Pinault-Thaury; Estelle Loire; François Jomard; Anton Gusev; Mawuena Rémi Degnon; Antoine Silvestre de Ferron; Laurent Pecastaing
- Published
- Publisher
- American Vacuum Society
- Journal / collection
- Journal of Vacuum Science & Technology B
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1116/6.0004605
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Cite this source
Marie-Amandine Pinault-Thaury; Estelle Loire; François Jomard; Anton Gusev; Mawuena Rémi Degnon; Antoine Silvestre de Ferron; Laurent Pecastaing. Secondary ion mass spectrometry as a tool to analyze semiconductor opening switch diodes. Journal of Vacuum Science & Technology B. 2025-06-09. https://doi.org/10.1116/6.0004605