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Research literature / Conference paper

Real-Time Metrology Capacity Optimization in Semiconductor Manufacturing

Mathis Martin; Stéphane Dauzère-Pérès; Claude Yugma; Aymen Mili; Renaud Roussel

Published
Publisher
IEEE
Journal / collection
2025 Winter Simulation Conference (WSC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/wsc68292.2025.11338867

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Mathis Martin; Stéphane Dauzère-Pérès; Claude Yugma; Aymen Mili; Renaud Roussel. Real-Time Metrology Capacity Optimization in Semiconductor Manufacturing. 2025 Winter Simulation Conference (WSC). 2025-12-07. https://doi.org/10.1109/wsc68292.2025.11338867

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