Addressing Energy and PFAS Chemical Consumption in Semiconductor Manufacturing: Case Study in a University Fab
William P. Shuley; Santosh K. Kurinec
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2025.3621131
The original publisher provides the full text and its access options.
Cite this source
William P. Shuley; Santosh K. Kurinec. Addressing Energy and PFAS Chemical Consumption in Semiconductor Manufacturing: Case Study in a University Fab. IEEE Transactions on Semiconductor Manufacturing. 2025-11. https://doi.org/10.1109/tsm.2025.3621131