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Research literature / Conference paper

Beyond Moore’s law: the chiplet revolution in semiconductor packaging

Yasumitsu Orii

Published
Publisher
SPIE
Journal / collection
Optical and EUV Nanolithography XXXIX
Research area
Semiconductors
Source type
Conference paper
DOI
10.1117/12.3091259

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Yasumitsu Orii. Beyond Moore’s law: the chiplet revolution in semiconductor packaging. Optical and EUV Nanolithography XXXIX. 2026-04-10. https://doi.org/10.1117/12.3091259

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