Human Interpretable Virtual Metrology in the Semiconductor Manufacturing
Amina Mević
- Published
- Publisher
- Association for the Advancement of Artificial Intelligence (AAAI)
- Journal / collection
- Proceedings of the AAAI Conference on Artificial Intelligence
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1609/aaai.v39i28.35219
The original publisher provides the full text and its access options.
Cite this source
Amina Mević. Human Interpretable Virtual Metrology in the Semiconductor Manufacturing. Proceedings of the AAAI Conference on Artificial Intelligence. 2025-04-11. https://doi.org/10.1609/aaai.v39i28.35219