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Evaluation of the Utility of “Spectrum Imaging” Using Auger Electron Spectroscopy for Semiconductor Materials

Konomi Ikita; Fuyuki Naveshima; Tatsuya Uchida; Akishiro Tanaka; Kenich Tsutsumi; Kazushiro Yokouchi; Noboru Taguchi

Published
Publisher
IEEE
Journal / collection
2025 IEEE 32nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/ipfa65338.2025.11256658

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Konomi Ikita; Fuyuki Naveshima; Tatsuya Uchida; Akishiro Tanaka; Kenich Tsutsumi; Kazushiro Yokouchi; Noboru Taguchi. Evaluation of the Utility of “Spectrum Imaging” Using Auger Electron Spectroscopy for Semiconductor Materials. 2025 IEEE 32nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). 2025-08-05. https://doi.org/10.1109/ipfa65338.2025.11256658

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