Automating abatement destruction or removal efficiency measurements in the semiconductor industry
Aaron D. Martinez; David A. Palsulich; Casey J. L. Johnson; Rahul Kumar Singh; Sachin D. Padghan; Soumya Mandal; Cristina Marini
- Published
- Publisher
- SPIE-Intl Soc Optical Eng
- Journal / collection
- Journal of Micro/Nanopatterning, Materials, and Metrology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1117/1.jmm.25.3.031404
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Cite this source
Aaron D. Martinez; David A. Palsulich; Casey J. L. Johnson; Rahul Kumar Singh; Sachin D. Padghan; Soumya Mandal; Cristina Marini. Automating abatement destruction or removal efficiency measurements in the semiconductor industry. Journal of Micro/Nanopatterning, Materials, and Metrology. 2026-01-16. https://doi.org/10.1117/1.jmm.25.3.031404