Application of Spectral Ellipsometry for Dielectric, Metal, and Semiconductor Films in Microelectronics Technology
R. A. Gaidukasov; A. V. Miakonkikh
- Published
- Publisher
- Pleiades Publishing Ltd
- Journal / collection
- Russian Microelectronics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1134/s1063739723600073
The original publisher provides the full text and its access options.
Cite this source
R. A. Gaidukasov; A. V. Miakonkikh. Application of Spectral Ellipsometry for Dielectric, Metal, and Semiconductor Films in Microelectronics Technology. Russian Microelectronics. 2024-02. https://doi.org/10.1134/s1063739723600073