Novel Applications of Nanoscale IR Spectroscopy Coupled with Atomic Force Microscopy for Semiconductor Failure Analysis
Cassandra Phillips; Chunzeng Li; Hartmut Stadler; Jinhee Kim; Qichi Hu; Peter De Wolf
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2026p0716
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Cite this source
Cassandra Phillips; Chunzeng Li; Hartmut Stadler; Jinhee Kim; Qichi Hu; Peter De Wolf. Novel Applications of Nanoscale IR Spectroscopy Coupled with Atomic Force Microscopy for Semiconductor Failure Analysis. International Symposium for Testing and Failure Analysis. 2026-10-04. https://doi.org/10.31399/asm.cp.istfa2026p0716