CONVOLUTIONAL NEURAL NETWORK MODEL FOR DEFECTS LOCALIZATION AND CLASSIFICATION ON PLATES DURING SEMICONDUCTOR PRODUCTION
Kazan National Research Technical University named after A.N. Tupolev; A.S. KATASEV; D.V. KATASEVA; Kazan National Research Technical University named after A.N. Tupolev; YU.N. SMIRNOV; Kazan State Power Engineering University; A.A. SIBGATULLIN; Kazan National Research Technical University named after A.N. Tupolev
- Published
- Publisher
- Kazan National Research Technological University
- Journal / collection
- Herald of Technological University
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.55421/1998-7072_2024_27_7_126
The original publisher provides the full text and its access options.
Cite this source
Kazan National Research Technical University named after A.N. Tupolev; A.S. KATASEV; D.V. KATASEVA; Kazan National Research Technical University named after A.N. Tupolev; YU.N. SMIRNOV; Kazan State Power Engineering University; A.A. SIBGATULLIN; Kazan National Research Technical University named after A.N. Tupolev. CONVOLUTIONAL NEURAL NETWORK MODEL FOR DEFECTS LOCALIZATION AND CLASSIFICATION ON PLATES DURING SEMICONDUCTOR PRODUCTION. Herald of Technological University. 2024. https://doi.org/10.55421/1998-7072_2024_27_7_126