Polyimide-based Release Material for Rapid and Precise Mass Transfer of Semiconductor Chips
Koki Ishida; Risano Nakajima; Kenta Aoshima; Yuta Kobayashi; Yukari Jo; Takenori Fujiwara; Daichi Miyazaki
- Published
- Publisher
- Technical Association of Photopolymers, Japan
- Journal / collection
- Journal of Photopolymer Science and Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.2494/photopolymer.37.485
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Cite this source
Koki Ishida; Risano Nakajima; Kenta Aoshima; Yuta Kobayashi; Yukari Jo; Takenori Fujiwara; Daichi Miyazaki. Polyimide-based Release Material for Rapid and Precise Mass Transfer of Semiconductor Chips. Journal of Photopolymer Science and Technology. 2024-06-25. https://doi.org/10.2494/photopolymer.37.485